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  • ”2
    ”2" to 450mm wafer resistivity and thin film metrology”
    ”Table top, Floor standing, EFEM”
  • ”performance, accuracy…”
    ”performance, accuracy…”
    ”automatic wafer load systems…”
  • ”…reliability, low cost of ownership”
    ”…reliability, low cost of ownership”
    ”…or table top manual wafer load systems”
  • ”wide selection of probes”
    ”wide selection of probes”
    ”soft touch smallest edge exclusion”
  • ”total flexibility of measurement patterns”
    ”total flexibility of measurement patterns”
    ”comprehensive data analysis software”

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Contact type resistance measurement
– Uses a 4-point(or 2-point) probe head to contact to the sample for the measurement.
– Wide measurement range
– Suitable for a various samples.


up-to-8_-remap-solar-168 blue smallContact type resistance measurement
– Uses a 4-point(or 2-point) probe head to contact to the sample for the measurement.
– Wide measurement range
– Suitable for a various samples.

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